MEMS three-dimensional co-vibration type vector hydrophone based on piezoelectric effect

基于压电效应的mems三维同振型矢量水听器

Abstract

The invention discloses an MEMS three-dimensional co-vibration type vector hydrophone based on a piezoelectric effect, and the hydrophone comprises a co-vibration cylindrical oscillator module and a co-vibration spherical oscillator module. The co-vibration cylindrical oscillator module comprises a first frame-shaped substrate, a cross beam, a cylindrical polyethylene vibration picking unit, a central connection body, a piezoelectric film, an upper electrode, and a lower electrode. The co-vibration spherical oscillator module is fixed on the central connection body, and the central connection body is connected to the center of the first frame-shaped substrate through a cross beam. Moreover, the piezoelectric film grows at inner and outer sides of the cross beam, and the corresponding parts of the upper and lower sides of the piezoelectric film are respectively provided with metals in a sputtering mode, wherein the metals serve as the upper and lower electrodes. The co-vibration spherical oscillator module comprises a second frame-shaped substrate, a cross beam, an annular connection body, a spherical polyethylene vibration picking unit, a piezoelectric film, an upper electrode, and a lower electrode. The hydrophone is small in size, achieves the high sensitivity in common mode output and differential mode inhibition, and is wide in working band.
本发明公开了一种基于压电效应的MEMS三维同振型矢量水听器,包括同振柱体振子模块以及同振球形振子模块,同振柱体振子模块包括第一框型基座、横梁、柱形聚乙烯拾振单元、中心连接体、压电薄膜、上电极以及下电极;柱形聚乙烯拾振单元固定于中心连接体上,中心连接体通过横梁连接在第一框型基座的中心处,且横梁的内外两侧均生长有压电薄膜,压电薄膜的上下两侧的对应位置均溅射有金属作为上电极和下电极;同振球形振子模块包括第二框型基座、横梁、环形连接体、球形聚乙烯拾振单元、压电薄膜以及上电极、下电极。本发明MEMS三维同振型矢量水听器具有体积小、共模输出、差模抑制的高灵敏度,宽工作频带的优点。

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